Title :
Constriction resistance of microcone-based contacts
Author :
Gu, Jin Jin ; Warner, Keith ; Qin, Shu ; Chan, Chung
Author_Institution :
Lasertron Inc., Burlington, MA, USA
fDate :
6/1/1995 12:00:00 AM
Abstract :
Based on a recently developed semiconductor processing technique for field emitters, molybdenum cones are made on the surface of contact members to achieve low constriction resistance. A model was set up to calculate the constriction resistance of such a cone-based contact interface. The constriction resistance is obtained from the solution to a linear system of current flow equations for the contact structure. The effects of surface features such as number, size and distribution of microcontacts, and cluster area on the constriction resistance were evaluated by a computer simulation. The least-square optimization of numerical results led to an empirical expression which relates the constriction resistance to the cone radius, cone density and cluster area. The model predicts the reduction of constriction resistance as a function of cone density, and it agrees well with the experimental results
Keywords :
contact resistance; current distribution; electrical contacts; least squares approximations; molybdenum; optimisation; simulation; surface topography; Mo; Mo cones; cluster area; computer simulation; cone density; cone radius; cone-based contact interface; constriction resistance; current flow equations; least-square optimization; microcone-based contacts; model; surface features; Computer simulation; Contact resistance; Equations; Fabrication; Linear systems; Predictive models; Senior members; Solid state circuits; Surface contamination; Surface resistance;
Journal_Title :
Components, Packaging, and Manufacturing Technology, Part A, IEEE Transactions on