Title :
Temperature-sensitive magnetic thin-film for micro sensor
Author :
Osada, Hiroshi ; Seki, Kyoshiro ; Matsuki, Hidetoshi ; Kikuchi, Shinji ; Murakami, Koichi
Author_Institution :
Dept. of Electr. & Electron. Eng., Iwate Univ., Morioka, Japan
fDate :
11/1/1995 12:00:00 AM
Abstract :
A temperature-sensitive magnetic thin-film (TMT) is made by sputtering Mn-Zn ferrite. Temperature-sensitive magnetic cores and thick-films have already been fabricated, however a magnetic thin-film with temperature dependence has not been shown yet. The authors developed a TMT by a new method with RF sputtering of a TMT utilizing a low Curie temperature Mn-Zn ferrite core as a target. The TMT with quick thermal response can be used as a micro temperature sensor, a thermomagnetic transducer or a photomagnetic device
Keywords :
ferrite devices; magnetic sensors; magnetic thin film devices; manganese compounds; microsensors; sputtered coatings; temperature sensors; zinc compounds; Curie temperature; Mn-Zn ferrite; MnZnFe2O4; RF sputtering; microsensor; photomagnetic device; temperature sensor; temperature-sensitive magnetic thin-film; thermal response; thermomagnetic transducer; Ferrites; Magnetic cores; Magnetic films; Magnetic sensors; Magnetooptic devices; Radio frequency; Sputtering; Temperature dependence; Temperature sensors; Transducers;
Journal_Title :
Magnetics, IEEE Transactions on
