DocumentCode
794620
Title
High performance GaAs JFET with shallow implanted Cd-gate
Author
Zolper, J.C. ; Baca, A.G. ; Sherwin, M.E. ; Shul, R.J.
Author_Institution
Dept. of Compound Semicond. Technol., Sandia Nat. Labs., Albuquerque, NM, USA
Volume
31
Issue
11
fYear
1995
fDate
5/25/1995 12:00:00 AM
Firstpage
923
Lastpage
924
Abstract
Shallow p+-regions in GaAs, formed by Cd ion implantation, have been used as the gate region for GaAs JFETs. 0.7 μm gate length JFETs demonstrated a transconductance of 165 mS/mm a saturation current of 130 mA/mm, an ft of 26 GHz, and an f max of 42 GHz. These frequency metrics are superior to previous Zn-gate JFETs of similar dimensions
Keywords
III-V semiconductors; cadmium; gallium arsenide; ion implantation; junction gate field effect transistors; 0.7 micron; 165 mS/mm; 26 GHz; 42 GHz; Cd ion implantation; GaAs:Cd; JFET; saturation current; shallow implanted Cd-gate; shallow p+-regions; transconductance;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19950596
Filename
390900
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