• DocumentCode
    794704
  • Title

    Effect of copper phthalocyanine layer thickness on properties of SAW NO2 sensor

  • Author

    Hechner, J. ; Soluch, W.

  • Author_Institution
    Inst. of Electron. Mater. Technol., Warsaw, Poland
  • Volume
    38
  • Issue
    15
  • fYear
    2002
  • fDate
    7/18/2002 12:00:00 AM
  • Firstpage
    841
  • Lastpage
    842
  • Abstract
    Insertion loss changes of a surface acoustic wave (SAW) delay line fabricated on the 128°YX LiNbO3 crystal, caused by a copper phthalocyanine adsorption of NO2, were measured at a frequency of 70 MHz. It was found, that to obtain a maximum change of the insertion loss for 20 ppm concentration of NO2 at a temperature of 130°C, the layer thickness should be about 1.5 μm. This layer can be used for NO2 concentration measurements in the range from about 1 to 500 ppm
  • Keywords
    gas sensors; lithium compounds; losses; nitrogen compounds; surface acoustic wave delay lines; surface acoustic wave sensors; 1.5 micron; 130 degC; 70 MHz; LiNbO3; NO2; SAW sensor; concentration measurements; copper phthalocyanine layer; delay line; insertion loss changes; layer thickness;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:20020560
  • Filename
    1021878
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=794704