Title :
The Use of an Energy Dispersive X-Ray Analyzer in Scanning Electron Microscopy
Author :
Elad, E. ; Sandborg, A.O. ; Russ, J.C. ; Van Gorp, T.
Author_Institution :
Nuclear Diodes, Inc., Prairie View, Ill.
Abstract :
The application of a high resolution semiconductor energy dispersive x-ray analyzer in scanning electron microscopy is described. Optimum specifications of an x-ray spectrometer for such application are outlined and various problems related to detection of low energy x-rays are discussed. Characteristic x-rays of elements down to oxygen were detected with the described system, making it useful for a variety of industrial and research applications.
Keywords :
Biomedical optical imaging; Dispersion; Electron beams; Electron optics; Energy resolution; Optical microscopy; Probes; Scanning electron microscopy; Spectroscopy; Transmission electron microscopy;
Journal_Title :
Nuclear Science, IEEE Transactions on
DOI :
10.1109/TNS.1970.4325597
