Title :
Glass waveguides on silicon for hybrid optical packaging
Author :
Henry, C.H. ; Blonder, G.E. ; Kazarinov, R.F.
Author_Institution :
AT&T Bell Labs., Murray Hill, NJ, USA
fDate :
10/1/1989 12:00:00 AM
Abstract :
Work on deposited glass waveguides on silicon to form waveguides and filters is reviewed. The choice of these particular waveguides makes sense only as part of a consistent approach to optoelectronic packaging. Hybrid optical packaging on silicon (HOPS) is described and briefly compared with other techniques. For these packages, two waveguides were developed: a tight mode waveguide with a silicon nitride rib core for matching a semiconductor laser and a loose mode waveguide with a phosphosilicate glass core for matching an optical fiber
Keywords :
integrated optoelectronics; optical fibres; optical filters; optical glass; optical waveguides; reviews; semiconductor junction lasers; silicon; HOPS; Si; Si3N4; SiO2-P2O5; deposited glass waveguides; hybrid optical packaging; integrated optoelectronics; loose mode waveguide; optical fiber; optical fibre matching; optical filters; optoelectronic packaging; phosphosilicate glass core; semiconductor laser; semiconductor laser matching; silicon nitride rib core; spatial filters; tight mode waveguide; Fiber lasers; Glass; Laser modes; Optical filters; Optical sensors; Optical waveguide components; Optical waveguides; Semiconductor device packaging; Semiconductor waveguides; Silicon;
Journal_Title :
Lightwave Technology, Journal of
