Title :
Fully self-aligned microwave InP/GaInAs single heterojunction bipolar transistors
Author :
Schumacher, L. ; Hayes, J.R. ; Bhat, Ritesh ; Esagui, R. ; Koza, M.
Abstract :
Fully self-aligned InP/GaInAs single heterojunction bipolar transistors have been fabricated using a polyimide layer for the base-emitter contact separation. A common emitter current gain cutoff frequency fT=46 GHz and associated fmax=24 GHz were derived from the S-parameter measurements at a collector current density of 1.5*105 A/cm2.
Keywords :
III-V semiconductors; gallium arsenide; heterojunction bipolar transistors; indium compounds; solid-state microwave devices; 46 GHz; HBT; III-V semiconductors; InP-GaInAs; S-parameter measurements; SHBT; SHF; base-emitter contact separation; common emitter current gain cutoff frequency; fabrication; heterojunction bipolar transistors; microwave device; polyimide layer; self aligned device; single heterojunction;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19890093