DocumentCode
795576
Title
Fully self-aligned microwave InP/GaInAs single heterojunction bipolar transistors
Author
Schumacher, L. ; Hayes, J.R. ; Bhat, Ritesh ; Esagui, R. ; Koza, M.
Volume
25
Issue
2
fYear
1989
Firstpage
127
Lastpage
128
Abstract
Fully self-aligned InP/GaInAs single heterojunction bipolar transistors have been fabricated using a polyimide layer for the base-emitter contact separation. A common emitter current gain cutoff frequency fT=46 GHz and associated fmax=24 GHz were derived from the S-parameter measurements at a collector current density of 1.5*105 A/cm2.
Keywords
III-V semiconductors; gallium arsenide; heterojunction bipolar transistors; indium compounds; solid-state microwave devices; 46 GHz; HBT; III-V semiconductors; InP-GaInAs; S-parameter measurements; SHBT; SHF; base-emitter contact separation; common emitter current gain cutoff frequency; fabrication; heterojunction bipolar transistors; microwave device; polyimide layer; self aligned device; single heterojunction;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19890093
Filename
14263
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