• DocumentCode
    796706
  • Title

    Micro-opto mechanical switch integrated on silicon

  • Author

    Ollier, E. ; Labeye, P. ; Revol, F.

  • Author_Institution
    LETI, CEA Technol. Avancees, Grenoble, France
  • Volume
    31
  • Issue
    23
  • fYear
    1995
  • fDate
    11/9/1995 12:00:00 AM
  • Firstpage
    2003
  • Lastpage
    2005
  • Abstract
    A micro-opto-mechanical switch 1*2 has been achieved using a combination of two technologies, integrated optics and micromachining on silicon. The commutation is obtained by means of the mechanical deflection of a cantilever beam driven by an electrostatic force. The first functional results are reported
  • Keywords
    integrated optics; micromachining; micromechanical devices; optical switches; optical waveguides; silicon; Si; cantilever beam; electrostatic force; integrated optics; mechanical deflection; micro-opto-mechanical switch; micromachining;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19951354
  • Filename
    490602
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=796706