DocumentCode :
797204
Title :
Thermal and Radiation Stability of Thin-Film Cermet Resistive Elements
Author :
Tarpley, John L.
Volume :
17
Issue :
6
fYear :
1970
Firstpage :
373
Lastpage :
379
Abstract :
Recent laboratory experiments indicate that cermet thin-film resistors consisting of an 80/20 mixture of chromium and silicon monoxide can be fabricated to high sheet resistances up to 4500 ohms per square. These films show a pronounced thermal stability of <1 ppm/°C from -50°C to +175°C. Radiation stability of the films is ¿1% variance in absolute resistance for fluences up to 1 × 1015 e/cm2 at a 1.5 MeV energy level.
Keywords :
Ceramics; Chromium; Energy states; Laboratories; Resistors; Semiconductor thin films; Silicon; Thermal resistance; Thermal stability; Transistors;
fLanguage :
English
Journal_Title :
Nuclear Science, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9499
Type :
jour
DOI :
10.1109/TNS.1970.4325820
Filename :
4325820
Link To Document :
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