Performance Improvement of Ultralow Temperature Polycrystalline Silicon TFT on Plastic Substrate by Plasma Oxidation of Polycrystalline Si Surface

The thin-film transistor (TFT) performances were enhanced and stabilized by the plasma oxidation of the polycrystalline Si surface prior to the plasma enhanced atomic layer deposition of an Al₂O₃ gate dielectric film. The authors attribute this improvement to the formation of a high-quality oxide interface layer between the gate dielectric film and the poly-Si film. The interface oxide has a predominant effect on the TFT´s characteristics and is regulated by the plasma oxidation temperature and the gap distance between the electrode and polycrystalline Si surface