• DocumentCode
    800762
  • Title

    Magnetic Levitation Assisted Guide for a Linear Micro-Actuator

  • Author

    Ruffert, Christine ; Gehrking, Ralf ; Ponick, Bernd ; Gatzen, Hans H.

  • Author_Institution
    Inst. for Microtechnoloy, Hanover, NH
  • Volume
    42
  • Issue
    11
  • fYear
    2006
  • Firstpage
    3785
  • Lastpage
    3787
  • Abstract
    In linear micro-actuators based on the electromagnetic driving principle, attractive vertical forces are generated between stator and traveler in addition to the drive forces. These vertical forces reduce the resulting driving force of the motor depending on the quality of the applied guide system. Thus, the development of an adequate guide system with a very small friction is required to guarantee an efficient operation mode. This paper describes the development of a guide system based on repulsive magnetic forces to partially compensate the vertical forces of a linear hybrid step micromotor
  • Keywords
    electromagnetic actuators; linear motors; magnetic forces; magnetic levitation; microactuators; micromotors; stepping motors; electromagnetic driving; linear hybrid step micromotor; linear microactuators; magnetic guide; magnetic levitation; micro-coil; repulsive magnetic forces; resulting driving force; Coils; Electromagnets; Friction; Magnetic films; Magnetic flux; Magnetic levitation; Microactuators; Permanent magnets; Soft magnetic materials; Stators; Magnetic guide; magnetic levitation; micro-actuator; micro-coil; thin-film technology;
  • fLanguage
    English
  • Journal_Title
    Magnetics, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9464
  • Type

    jour

  • DOI
    10.1109/TMAG.2006.879160
  • Filename
    1715695