• DocumentCode
    801531
  • Title

    Thermal Stability of Fe-Zr/Fe-Zr-N Soft Magnetic Multilayered Films

  • Author

    Ono, H. ; Fujinaga, M. ; Yonemoto, T. ; Miyagawa, T.

  • Author_Institution
    RIMES Ltd.
  • Volume
    7
  • Issue
    11
  • fYear
    1992
  • Firstpage
    907
  • Lastpage
    911
  • Abstract
    stract-Fe-Zr/Fe-Zr-N multilayered films were prepared by alternation of Fe-Zr sputtering and electron cyclotron resonance (ECR) plasma nitridation. Thermal stability of the films´ soft magnetic properties was investigated. A saturation flux density of Bs=1.8 T, coercivity Hc=88 A/m and relative permeability ¿´≫3000 (at 20 MHz) were obtained for Fe92Zr8/Fe92Zr8-N multilayered film after annealing at 773K for 3600 s. Addition of Zr to Fe/Fe-N multilayered films effectively improves the thermal stability of soft magnetic properties.
  • Keywords
    Iron; Magnetic films; Magnetic flux; Magnetic properties; Magnetic resonance; Plasma stability; Saturation magnetization; Soft magnetic materials; Thermal stability; Zirconium;
  • fLanguage
    English
  • Journal_Title
    Magnetics in Japan, IEEE Translation Journal on
  • Publisher
    ieee
  • ISSN
    0882-4959
  • Type

    jour

  • DOI
    10.1109/TJMJ.1992.4565528
  • Filename
    4565528
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=801531