Title :
Using self-assembly for the fabrication of nano-scale electronic and photonic devices
Author :
Parviz, Babak Amir ; Ryan, Declan ; Whitesides, George M.
Author_Institution :
Dept. of Chem. & Chem. Biol., Harvard Univ., Cambridge, MA, USA
Abstract :
Challenges facing the scaling of microelectronics to sub-50 nm dimensions and the demanding material and structural requirements of integrated photonic and microelectromechanical systems suggest that alternative fabrication technologies are needed to produce nano-scale devices. Inspired by complex, functional, self-assembled structures and systems found in Nature we suggest that self-assembly can be employed as an effective tool for nanofabrication. We define a self-assembling system as one in which the elements of the system interact in pre-defined ways to spontaneously generate a higher order structure. Self-assembly is a parallel fabrication process that, at the molecular level, can generate three-dimensional structures with sub-nanometer precision. Guiding the process of self-assembly by external forces and geometrical constraints can reconfigure a system dynamically on demand. We survey some of the recent applications of self-assembly for nanofabrication of electronic and photonic devices. Five self-assembling systems are discussed: 1) self-assembled molecular monolayers; 2) self-assembly in supramolecular chemistry; 3) self-assembly of nanocrystals and nanowires; 4) self-assembly of phase-separated block copolymers; 5) colloidal self-assembly. These techniques can generate features ranging in size from a few angstroms to a few microns. We conclude with a discussion of the limitations and challenges facing self-assembly and some potential directions along which the development of self-assembly as a nanofabrication technology may proceed.
Keywords :
integrated optoelectronics; micromechanical devices; monolayers; nanoelectronics; nanostructured materials; nanowires; photonic crystals; polymer blends; self-assembly; semiconductor quantum dots; colloidal self-assembly; dynamic system reconfiguration; fabrication technologies; geometrical constraints; integrated photonic systems; microelectromechanical systems; microelectronics scaling; molecular level; nano-scale electronic devices; nano-scale photonic devices; nanocrystals; nanofabrication; nanowires; parallel fabrication process; phase-separated block copolymers; self-assembled molecular monolayers; self-assembly; spontaneous higher order structure generation; sub-50 nm dimensions; supramolecular chemistry; three-dimensional structures; Chemistry; Fabrication; Microelectromechanical systems; Microelectronics; Nanocrystals; Nanofabrication; Nanoscale devices; Nanowires; Photonics; Self-assembly;
Journal_Title :
Advanced Packaging, IEEE Transactions on
DOI :
10.1109/TADVP.2003.817971