• DocumentCode
    803266
  • Title

    Analysis of the Back-Gate Effect on the on-State Breakdown Voltage of Smartpower SOI Devices

  • Author

    Schwantes, Stefan ; Furthaler, Josef ; Wecker, Bernd Schau ; Dietz, Franz ; Graf, Michael ; Dudek, Volker

  • Author_Institution
    Technol. Dev., Atmel Germany GmbH, Heilbronn
  • Volume
    6
  • Issue
    3
  • fYear
    2006
  • Firstpage
    377
  • Lastpage
    385
  • Abstract
    This paper discusses the impact of the back-gate bias on the on-state drain breakdown voltage of high-voltage silicon-on-insulator (SOI) MOSFETs. This is mandatory in order to understand the physical mechanisms behind the limitations of the safe operation area (SOA) of SOI power devices. The back-gate electrode of the SOI material will add an additional dimension to the SOA, thereby causing further reliability constraints on the circuit design. For small and negative back-gate bias, the SOA is limited by the on-state breakdown whereas the off-state breakdown sets the limit for positive back-gate bias. For the first time, an analytical model of the breakdown voltage covering the reasonable back-gate voltage range is presented providing a first step toward a closed form circuit simulation of this effect. It is shown that the back-gate potential impacts on the breakdown behavior by modulating the carrier distribution in the drift region, the base transport factor of the parasitic bipolar transistor, and the drift region resistance. Moreover, it is shown that avalanche multiplication is the limiting breakdown mechanism for lateral SOI power devices
  • Keywords
    MOSFET; power integrated circuits; power semiconductor devices; silicon-on-insulator; MOSFET; RESURF; SOI power devices; back gate effect; device breakdown; high voltage silicon on insulator; on state breakdown voltage; safe operation area; smart power devices; Analytical models; Breakdown voltage; Circuit simulation; Circuit synthesis; Electric breakdown; Electrodes; MOSFETs; Materials reliability; Semiconductor optical amplifiers; Silicon on insulator technology; Device breakdown; RESURF; high-voltage; on-state breakdown; silicon-on-insulator (SOI); smartpower;
  • fLanguage
    English
  • Journal_Title
    Device and Materials Reliability, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    1530-4388
  • Type

    jour

  • DOI
    10.1109/TDMR.2006.883128
  • Filename
    1717486