THz Waveguide Mixers With NbTiN HEBs on Silicon Nitride Membranes

Author

Muñoz, Pedro Pablo ; Bedorf, Sven ; Brandt, Michael ; Tils, Thomas ; Honingh, Netty ; Jacobs, Karl

Author_Institution

I Phys. Inst., Koln Univ.

Volume

16

Issue

11

fYear

2006

Firstpage

606

Lastpage

608

Abstract

We describe the design and performance of waveguide mixers at 1.4 THz and 1.9 THz based on NbTiN phonon-cooled hot electron bolometers (HEBs) fabricated on a 2-mum thick Si₃N₄ membrane. The membrane is bonded to a silicon frame in the mixer block using a flip chip process. Simulated RF coupling is compared with experimental results, showing good agreement. Receiver noise temperature measurements show uncorrected values of 1600 K at 1.4 THz and 2100 K at 1.9 THz, both at 1.5GHz intermediate frequency. Device cooling on the membrane seems not to be problematic. The mixers are used in receivers for the Stratospheric Observatory for Infrared Astronomy (SOFIA) [German REceiver At THz frequencies (GREAT)] and the Atacama path finder experiment (APEX) [CO, N⁺, deuterium observations receiver (CONDOR)]

Keywords

bolometers; flip-chip devices; niobium compounds; silicon compounds; submillimetre astronomy; submillimetre wave mixers; submillimetre wave receivers; superconducting mixers; waveguide components; 1 micron; 1.4 THz; 1.5 GHz; 1.9 THz; 1600 K; 2100 K; NbTiN; Si₃N₄; THz waveguide mixers; device cooling; flip chip process; hot electron bolometers; receivers; silicon nitride membranes; Biomembranes; Bolometers; Bonding; Cooling; Electrons; Flip chip; Optical receivers; Radio frequency; Silicon; Temperature measurement; Heterodyne mixer; silicon-nitride membrane; superconducting hot electron bolometer (HEB); terahertz (THz) waveguide;

fLanguage

English

Journal_Title

Microwave and Wireless Components Letters, IEEE

Publisher

ieee

ISSN

1531-1309

Type

jour

DOI

10.1109/LMWC.2006.884907

Filename

1717518