Title :
An innovative bonding technique for optical chips using solder bumps that eliminate chip positioning adjustments
Author :
Hayashi, Tsuyoshi
Author_Institution :
NTT Interdisciplinary Res. Lab., Tokyo, Japan
fDate :
4/1/1992 12:00:00 AM
Abstract :
The valuable feature of this technique is self-alignment of the optical chips due to the surface tension of the molten solder. This eliminates the need for painstaking adjustments of chips positioning for coupling purposes. The alignment accuracy increases as the solder bump diameter decreases and as the number of bumps increases. An average misalignment of 1.0 μm was obtained for specimens with four bumps 75 μm in diameter, whereas an average misalignment of 0.8 μm was obtained for specimens with 16 bumps 130 μm in diameter. The long-term stability of the alignment accuracy was tested by subjecting the specimens to thermal cycling. Alignment fluctuations of less than ±0.5 μm were found after 1000 h (over 300 cycles). These results suggest that the solder bumps are suitable for such applications as the bonding of photodetectors to optoelectronic circuit boards
Keywords :
integrated optoelectronics; lead bonding; photodetectors; soldering; 1000 h; alignment accuracy; average misalignment; bonding technique; chip positioning adjustments; long-term stability; optical chips; optoelectronic circuit boards; photodetectors; self-alignment; solder bump diameter; solder bumps; surface tension; thermal cycling; Bonding; Coupling circuits; Geometrical optics; Integrated optics; Optical coupling; Optical devices; Optical waveguides; Particle beam optics; Printed circuits; Thermal stability;
Journal_Title :
Components, Hybrids, and Manufacturing Technology, IEEE Transactions on