DocumentCode :
80410
Title :
Fabrication and characterisation of high sensitivity copper-copper oxide-copper (Cu-CuO-Cu) metal-insulator-metal tunnel junctions
Author :
Abdel-Rahman, Mohamed ; Syaryadhi, M. ; Debbar, Nacer
Author_Institution :
Prince Sultan Adv. Technol. Res. Inst. (PSATRI), King Saud Univ., Riyadh, Saudi Arabia
Volume :
49
Issue :
5
fYear :
2013
fDate :
February 28 2013
Firstpage :
363
Lastpage :
364
Abstract :
A report is presented on the realisation and characterisation of symmetrical metal-insulator-metal (MIM) diodes using the new material combination: copper-copper oxide-copper (Cu-CuO-Cu). The MIM diodes, having contact areas of 2 × 2 ×m2, were fabricated using electron beam lithography and sputter deposition. The MIM diodes exhibited an absolute sensitivity as high as 4.497 V- 1.
Keywords :
MIM structures; electron beam lithography; sputter deposition; Cu-CuO-Cu; electron beam lithography; high sensitivity copper-copper oxide-copper; metal-insulator-metal tunnel junctions; size 2 mum; sputter deposition; symmetrical metal-insulator-metal diodes;
fLanguage :
English
Journal_Title :
Electronics Letters
Publisher :
iet
ISSN :
0013-5194
Type :
jour
DOI :
10.1049/el.2012.4222
Filename :
6473960
Link To Document :
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