DocumentCode :
804417
Title :
Photoacoustic determination of the residual stress and transverse isotropic elastic moduli in thin films of the polyimide PMDA/ODA
Author :
Rogers, John A. ; Nelson, Keith A.
Author_Institution :
MIT, Cambridge, MA, USA
Volume :
42
Issue :
4
fYear :
1995
fDate :
7/1/1995 12:00:00 AM
Firstpage :
555
Lastpage :
566
Abstract :
We present results of experiments on thin films of the polyimide PMDA/ODA using the real-time impulsive stimulated thermal scattering (ISTS) technique. We determine the transverse isotropic modulus, and we describe a method which allows residual stress determination from ISTS data. The residual stress determined in this way is in good agreement with measurements made using other techniques.<>
Keywords :
elastic moduli; internal stresses; photoacoustic effect; polymer films; stimulated scattering; PMDA/ODA; photoacoustic measurement; polyimide; real-time impulsive stimulated thermal scattering; residual stress; thin films; transverse isotropic elastic moduli; Adhesives; Anisotropic magnetoresistance; Mechanical factors; Polyimides; Polymer films; Residual stresses; Scattering; Substrates; Thermal stresses; Transistors;
fLanguage :
English
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
Publisher :
ieee
ISSN :
0885-3010
Type :
jour
DOI :
10.1109/58.393098
Filename :
393098
Link To Document :
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