• DocumentCode
    804510
  • Title

    Structure and Tribological Characteristics of DC-Magnetron Sputtered DLC Overlayer Films

  • Author

    Nimura, K. ; Nishimura, M. ; Kashiwakura, Y. ; Itoh, Y. ; Kumagai, A. ; Ueda, A. ; Ohsawa, M. ; Ozawa, K.

  • Author_Institution
    Fuji Electric Co., Ltd.
  • Volume
    9
  • Issue
    2
  • fYear
    1994
  • Firstpage
    56
  • Lastpage
    62
  • Abstract
    We investigated the structure xand tribological properties of diamond-like carbon (DLC) overcoat films for rigid magnetic disks. DLC films were produced by DC magnetron sputtering, introducing CH4 gas into Ar gas in various quantities. Drag tests and CSS tests were performed, and the electrical resistivity, Raman spectra and film hydrogen contents were measured. A more polymer-like DLC film appeared to have good tribological properties, making it suitable as a hard-head slider material (Al2O3-TiC).
  • Keywords
    Argon; Cascading style sheets; Diamond-like carbon; Drag; Magnetic films; Magnetic properties; Performance evaluation; Polymer films; Sputtering; Testing;
  • fLanguage
    English
  • Journal_Title
    Magnetics in Japan, IEEE Translation Journal on
  • Publisher
    ieee
  • ISSN
    0882-4959
  • Type

    jour

  • DOI
    10.1109/TJMJ.1994.4565827
  • Filename
    4565827
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=804510