Double-Structured Laminated Heads with Substrate Bias-Sputtered FeTaN Films

Substrate bias-sputtered FeTaN/SiO2 multilayer films with a doublelayer structure were prepared from electrically insulated thick FeTaN layers. These were built up of thin FeTaN layers with alternating anisotropy direction. Such films, hereafter referred to as "Double-Structured substrate Bias-sputtered Multilayer" (DSBM) films, were developed for potential application in magnetic heads. Double-Structured Laminated (DSL) heads composed of DSBM films sandwiched between ceramic substrates have been developed. These heads exhibit excellent recording characteristics equal to those of heads composed of Conventional Laminated (CL) FeTaN film heads used with high-coercivity tape. However, their reproduction characteristics are superior to those of CL heads at high frequencies.