DocumentCode
805734
Title
Fabrication of Thin-Film Actuators Using Magnetostriction
Author
Honda, T. ; Hayashi, Y. ; Yamaguchi, M. ; Arai, K.I.
Author_Institution
Tokin Corp.
Volume
9
Issue
6
fYear
1994
Firstpage
27
Lastpage
32
Abstract
We fabricated two kinds of cantilever actuator and a traveling machine by using magnetostrictive Tb-Fe and Sm-Fe thin films on a polyimide substrate. No power supply cable is required for their actuation, because they are driven by an external magnetic field. The magnetostrictive cantilevers exhibited a large deflection in low magnetic fields. Their unique characteristics suggest that magnetostriction can be used as the driving mechanism of microactuators.
Keywords
Actuators; Amorphous magnetic materials; Fabrication; Magnetic fields; Magnetic films; Magnetic materials; Magnetostriction; Microactuators; Polyimides; Transistors;
fLanguage
English
Journal_Title
Magnetics in Japan, IEEE Translation Journal on
Publisher
ieee
ISSN
0882-4959
Type
jour
DOI
10.1109/TJMJ.1994.4565953
Filename
4565953
Link To Document