• DocumentCode
    805969
  • Title

    Vorticity and quantum interference in ultra-small SOI MOSFETs

  • Author

    Gilbert, Matthew J. ; Ferry, David K.

  • Author_Institution
    Dept. of Electr. Eng., Arizona State Univ., Tempe, AZ, USA
  • Volume
    4
  • Issue
    3
  • fYear
    2005
  • fDate
    5/1/2005 12:00:00 AM
  • Firstpage
    355
  • Lastpage
    359
  • Abstract
    As scaling and performance needs of industry has continued, silicon-on-insulator technology appears to be a viable option. However, the small sizes of these structures require a quantum treatment for the transport. In this paper, we present results from a full three-dimensional (3-D) quantum simulation and describe the effects of quantum interference and vorticity arising from the discrete nature of the dopant atoms. In wide (∼18 nm) channel devices, as the electrons travel from the source to the drain of the device, vortices in their motion form, based on the 3-D positions of the dopant atoms in the device. For a narrow-channel device (∼8 nm), the quantum interference effects are exacerbated, as seen in the output currents. The vorticity of the electron density is not suppressed at low drain biases. However, at higher drain biases, the vortices are washed out due to increased interaction with the channel dopants and increased carrier energy.
  • Keywords
    MOSFET; elemental semiconductors; quantum interference phenomena; semiconductor process modelling; silicon; silicon compounds; silicon-on-insulator; 18 nm; 8 nm; Si-SiO2; carrier energy; channel dopants; discrete nature; dopant atoms; electron density; full three-dimensional quantum simulation; narrow-channel device; quantum interference; quantum treatment; silicon-on-insulator; ultrasmall SOI MOSFET; vorticity; Atomic layer deposition; Boundary conditions; Electronics industry; Electrons; Interference; MOS devices; MOSFETs; Particle scattering; Quantum mechanics; Silicon on insulator technology; MOSFET; quantum interference; silicon-on-insulator (SOI); vorticity;
  • fLanguage
    English
  • Journal_Title
    Nanotechnology, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    1536-125X
  • Type

    jour

  • DOI
    10.1109/TNANO.2005.846915
  • Filename
    1430673