DocumentCode
805969
Title
Vorticity and quantum interference in ultra-small SOI MOSFETs
Author
Gilbert, Matthew J. ; Ferry, David K.
Author_Institution
Dept. of Electr. Eng., Arizona State Univ., Tempe, AZ, USA
Volume
4
Issue
3
fYear
2005
fDate
5/1/2005 12:00:00 AM
Firstpage
355
Lastpage
359
Abstract
As scaling and performance needs of industry has continued, silicon-on-insulator technology appears to be a viable option. However, the small sizes of these structures require a quantum treatment for the transport. In this paper, we present results from a full three-dimensional (3-D) quantum simulation and describe the effects of quantum interference and vorticity arising from the discrete nature of the dopant atoms. In wide (∼18 nm) channel devices, as the electrons travel from the source to the drain of the device, vortices in their motion form, based on the 3-D positions of the dopant atoms in the device. For a narrow-channel device (∼8 nm), the quantum interference effects are exacerbated, as seen in the output currents. The vorticity of the electron density is not suppressed at low drain biases. However, at higher drain biases, the vortices are washed out due to increased interaction with the channel dopants and increased carrier energy.
Keywords
MOSFET; elemental semiconductors; quantum interference phenomena; semiconductor process modelling; silicon; silicon compounds; silicon-on-insulator; 18 nm; 8 nm; Si-SiO2; carrier energy; channel dopants; discrete nature; dopant atoms; electron density; full three-dimensional quantum simulation; narrow-channel device; quantum interference; quantum treatment; silicon-on-insulator; ultrasmall SOI MOSFET; vorticity; Atomic layer deposition; Boundary conditions; Electronics industry; Electrons; Interference; MOS devices; MOSFETs; Particle scattering; Quantum mechanics; Silicon on insulator technology; MOSFET; quantum interference; silicon-on-insulator (SOI); vorticity;
fLanguage
English
Journal_Title
Nanotechnology, IEEE Transactions on
Publisher
ieee
ISSN
1536-125X
Type
jour
DOI
10.1109/TNANO.2005.846915
Filename
1430673
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