DocumentCode
807376
Title
Drastic morphological improvements in GaAs growth on undercut mesa stripes by MBE
Author
Takamori, Toshi ; Watanabe, K. ; Kamijoh, T.
Author_Institution
OKI Electric Industry Co Ltd., Tokyo, Japan
Volume
28
Issue
24
fYear
1992
Firstpage
2207
Lastpage
2209
Abstract
The growth of GaAs on undercut mesa-striped substate by MBE is studied. Drastic improvements in surface morphology are achieved by off-aligning the stripe direction from the
Keywords
III-V semiconductors; gallium arsenide; molecular beam epitaxial growth; scanning electron microscope examination of materials; semiconductor growth; surface structure; GaAs growth; MBE; SEM; stripe direction; surface morphology; undercut mesa-striped substate;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19921418
Filename
173047
Link To Document