Title :
Inversion-channel Si/SiGe heterojunction field-effect transistor
Author :
Kovacic, S.J. ; Simmons, Jay G. ; Noel, Jean-Philippe ; Houghton, D.C. ; Buchanan, M.
Author_Institution :
McMaster Univ., Hamilton, Ont., Canada
Abstract :
The p-channel operation of a selfaligned heterojunction field-effect transistor (HFET) based on an Si/Si0.75Ge0.25 heterostructure is demonstrated. Extrinsic transconductance gm greater than 8 mS/mm for a device with 1 mu m gate length was measured at 300 K. The high frequency 3 dB point has been measured to be 1.8 GHz.
Keywords :
Ge-Si alloys; elemental semiconductors; field effect transistors; silicon; 1 micron; 1.8 GHz; 8 mS; Si-Si 0.75Ge 0.25 heteorstructure; extrinsic transconductance; gate length; high frequency 3 dB point; inversion channel HFET; p-channel operation; selfaligned heterojunction field-effect transistor;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19921435