• DocumentCode
    807610
  • Title

    Spatial control of quantum well intermixing in GaAs/AlGaAs using a one-step process

  • Author

    Beavuvis, J. ; Marsh, John H.

  • Volume
    28
  • Issue
    24
  • fYear
    1992
  • Firstpage
    2240
  • Lastpage
    2241
  • Abstract
    Dielectric cap disordering with strontium fluoride masking is used to provide a range of bandgap values in GaAs/AlGaAs quantum wells using a single annealing step. Partial area coverage by a strontium fluoride mask under a silica cap determines the amount of quantum well intermixing.
  • Keywords
    III-V semiconductors; aluminium compounds; annealing; chemical interdiffusion; energy gap; gallium arsenide; semiconductor quantum wells; annealing; bandgap values; dieletric cap disordering; intermixing spatial control; one-step process; quantum well intermixing; silica cap;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19921440
  • Filename
    173069