DocumentCode
807927
Title
CVM--A Microprocessor-Based Intelligent Instrument
Author
Wu, Chin Tao
Author_Institution
Solid-State Technology Center, RCA Laboratories, Somerville, NJ 08876.
Issue
2
fYear
1978
fDate
5/1/1978 12:00:00 AM
Firstpage
125
Lastpage
129
Abstract
This paper describes an intelligent instrument for monitoring physical characteristics of MOS wafers. The microprocessor-based CVM provides on-the-spot capacitance-voltage analysis during manufacturing. It then sends the accumulated data to a remote mainframe as a time-sharing user, so that an archival database can be maintained and long-term trend analysis can be made.
Keywords
Capacitance; Capacitance-voltage characteristics; Computerized monitoring; Instruments; Manufacturing processes; Remote monitoring; Solid state circuits; Statistical analysis; Time sharing computer systems; Voltage;
fLanguage
English
Journal_Title
Industrial Electronics and Control Instrumentation, IEEE Transactions on
Publisher
ieee
ISSN
0018-9421
Type
jour
DOI
10.1109/TIECI.1978.351521
Filename
4159375
Link To Document