Sleeve-Type Ultra Miniature Optical Fiber Pressure Sensor Fabricated by DRIE

Author

Shimada, Masato ; Kinefuchi, Yoshio ; Takahashi, Koro

Author_Institution

Grad. Sch. of Sci. & Eng., Saitama Univ., Saitama

Volume

8

Issue

7

fYear

2008

fDate

7/1/2008 12:00:00 AM

Firstpage

1337

Lastpage

1341

Abstract

A diaphragm-type optical fiber pressure sensor, which has a sleeve for fiber insertion, is proposed, and its fundamental characteristics are demonstrated. The sleeve structure is fabricated by deep reactive ion etching (DRIE). The diaphragm with the sleeve is suitable for highly reliable and easy bonding between the sleeve and an optical fiber. The light intensity change by a Fabry-Perot interferometer according to pressure is increases by an improved DRIE method. The mesa attached to the diaphragm increased reflectance. The method of mass production for the developed diaphragm will be useful for realizing a low-cost pressure sensor.

Keywords

Fabry-Perot interferometers; blood pressure measurement; fibre optic sensors; micro-optomechanical devices; microsensors; optical fibre fabrication; pressure sensors; sputter etching; DRIE; Fabry-Perot interferometer; bonding area; deep reactive ion etching; diaphragm-type sensor fabrication; light intensity values; sleeve-type ultra miniature optical fiber pressure sensor; Biomedical monitoring; Blood pressure; Bonding; Fabry-Perot interferometers; Mirrors; Nickel; Optical fiber sensors; Optical fibers; Optical sensors; Sensor phenomena and characterization; Deep reactive ion etching; Fabry-Perot interferometer; optical fiber; pressure sensor;

fLanguage

English

Journal_Title

Sensors Journal, IEEE

Publisher

ieee

ISSN

1530-437X

Type

jour

DOI

10.1109/JSEN.2008.926970

Filename

4567498