DocumentCode :
808300
Title :
Characterization of the Temperature Dependence of the Piezoresistive Coefficients of Silicon From
C to
 silicon. In order to minimize errors associated with misalignment with the crystallographic axes on (001) silicon wafers, anisotropic wet etching was used to accurately locate the axes. Four-point bending (4PB) was used to generate the required stress in strip-on-beam samples, and finite-element simulations were used to determine the states of stress in the silicon material.</div>
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<div class='leftDiv labelDiv col-xs-4 col-sm-2 fullRecLabelEnglish'>Keywords : </div><div class='valueDiv leftDirection leftAlign col-xs-8 col-sm-10 fullRecValueEnglish'>bending; crystallography; etching; finite element analysis; piezoresistance; silicon; Si; anisotropic wet etching; crystallographic axes; finite-element simulations; four-point bending; piezoresistive coefficients; stress sensing test chips; stress sensors; strip-on-beam samples; temperature -150 degC to 125 degC; Assembly; Circuit testing; Integrated circuit packaging; Integrated circuit testing; Piezoresistance; Silicon; Stress measurement; Temperature dependence; Temperature distribution; Temperature sensors; (001) Silicon; piezoresistive coefficients; stress sensors;</div>
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<div class='leftDiv labelDiv col-xs-4 col-sm-2 fullRecLabelEnglish'>fLanguage : </div><div class='valueDiv leftDirection leftAlign col-xs-8 col-sm-10 fullRecValueEnglish'>English</div>
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<div class='leftDiv labelDiv col-xs-4 col-sm-2 fullRecLabelEnglish'>Journal_Title : </div><div class='valueDiv leftDirection leftAlign col-xs-8 col-sm-10 fullRecValueEnglish'>Sensors Journal, IEEE</div>
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<div class='leftDiv labelDiv col-xs-4 col-sm-2 fullRecLabelEnglish'>Publisher : </div><div class='valueDiv leftDirection leftAlign col-xs-8 col-sm-10 fullRecValueEnglish'>ieee</div>
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<div class='leftDiv labelDiv col-xs-4 col-sm-2 fullRecLabelEnglish'>ISSN : </div><div class='valueDiv leftDirection leftAlign col-xs-8 col-sm-10 fullRecValueEnglish'>1530-437X</div>
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<div class='leftDiv labelDiv col-xs-4 col-sm-2 fullRecLabelEnglish'>Type : </div><div class='valueDiv leftDirection leftAlign col-xs-8 col-sm-10 fullRecValueEnglish'>jour</div>
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<div class='leftDiv labelDiv col-xs-4 col-sm-2 fullRecLabelEnglish'>DOI : </div><div class='valueDiv leftDirection leftAlign col-xs-8 col-sm-10 fullRecValueEnglish'>10.1109/JSEN.2008.923575</div>
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<div class='leftDiv labelDiv col-xs-4 col-sm-2 fullRecLabelEnglish'>Filename : </div><div class='valueDiv leftDirection leftAlign col-xs-8 col-sm-10 fullRecValueEnglish'>4567511</div>
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<div class='leftDiv labelDiv col-xs-4 col-sm-2 fullRecLabelEnglish'>Link To Document : </div><div class='valueDiv leftDirection leftAlign fullRecValueEnglish col-xs-8 col-sm-10'><a href='https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=808300' target='_blank'>https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=808300</a></div>
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