Title :
An ultra-low dark current CMOS image sensor cell using n/sup +/ ring reset
Author :
Cheng, Hsiu-Yu ; King, Ya-Chin
Author_Institution :
Nat. Tsing Hua Univ., Hsinchu, Taiwan
Abstract :
We present in this letter for the first time a new CMOS image sensor cell using n/sup +/-ring-reset structure, which can isolate the photon-sensing area from the defective field oxide edge. The experimental results demonstrate that the severe dark current degradation of the conventional CMOS active pixel image sensor fabricated by a standard CMOS logic process is significantly alleviated. Through optimizing the layout arrangement, as high as 45% fill factor can be obtained. The dynamic range of this new cell can thus be improved by more than 10/spl times/ compared to a conventional cell.
Keywords :
CMOS image sensors; CMOS image sensor; active pixel sensor; dark current; dynamic range; fill factor; n/sup +/ ring reset; CMOS image sensors; CMOS logic circuits; CMOS process; Charge-coupled image sensors; Dark current; Image sensors; Optoelectronic and photonic sensors; Photodiodes; Pixel; Sensor arrays;
Journal_Title :
Electron Device Letters, IEEE
DOI :
10.1109/LED.2002.802587