Title :
Enhancement of domain inversion in LiTaO3 using heat treatment with metal-oxide mask
Author :
Yi, S.-Y. ; Shin, S.-Y.
Author_Institution :
Dept. of Electr. Eng., Korea Adv. Inst. of Sci. & Technol., Taejon, South Korea
fDate :
7/20/1995 12:00:00 AM
Abstract :
The domain inversion depth is enhanced in proton-exchanged LiTaO 3 using heat treatment with a metal-oxide mask. Since this method can lower the proton exchange rate to get the same domain inversion depth, the degradation of the crystal quality in the domain-inverted layer is reduced
Keywords :
electric domains; ferroelectric materials; heat treatment; ion exchange; lithium compounds; masks; optical fabrication; optical waveguides; LiTaO3; crystal quality; domain inversion depth; domain-inverted layer; heat treatment; metal-oxide mask; proton exchange rate;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19950859