A Micromirror With Large Static Rotation and Vertical Actuation

Author

Chiou, Jin-Chern ; Kou, Chin-Fu ; Lin, Yung-Jiun

Author_Institution

Dept. of Electr. & Control Eng., Nat. Chiao Tung Univ., Hsinchu

Volume

13

Issue

2

fYear

2007

Firstpage

297

Lastpage

303

Abstract

A micromirror with large rotation angle and vertical displacement is proposed and developed. The proposed micromirror is actuated by newly developed prestress comb drive actuators, which exhibit no pull-in, no hysteresis, and large vertical displacement range characteristics. The micromirror was fabricated using commercially available PolyMUMPs. Experimental results indicated that the maximum rotation angle and vertical displacement of the device are 26 and 45 mum, respectively

Keywords

microactuators; micromirrors; optical design techniques; optical fabrication; microelectromechanical systems; micromirror; polyMUMP; prestress comb drive actuator; rotation angle; vertical actuation; vertical displacement; Drives; Electrodes; Electrostatic actuators; Fabrication; Hysteresis; Micromechanical devices; Micromirrors; Optical attenuators; Optical switches; Principal component analysis; Microelectromechanical systems (MEMS); micromirror; microoptoelectromechanical systems (MOEMS); prestress comb drive actuator (PCA);

fLanguage

English

Journal_Title

Selected Topics in Quantum Electronics, IEEE Journal of

Publisher

ieee

ISSN

1077-260X

Type

jour

DOI

10.1109/JSTQE.2007.892069

Filename

4159965