Title :
Optically Actuated Nanoelectromechanical Oscillators
Author :
Ilic, B. Rob ; Krylov, Slava ; Kondratovich, Marianna ; Craighead, Harold G.
Author_Institution :
Cornell Univ., Ithaca, NY
Abstract :
Excitation of biologically functional micro- and nanomechanical structures using optical fields is a recently emerging arena of research that couples the fields of optics, fluidics, electronics, and mechanics with potential of generating novel chemical and biological sensors. We present experimental and theoretical elucidation of optical excitation of resonant nanoelectromechanical systems (NEMS). The modulated optical fields were coupled directly into the NEMS device layer causing amplified mechanical vibrations. Dynamic detection of vibrational characteristics of nanomechanical resonators, fabricated from low-stress silicon nitride and mono crystalline silicon thin film layers, was accomplished using optical interferometry. We have analyzed the actuation mechanism using finite element modeling, and we found that the dominant actuation mechanism in close proximity of the clamped end was primarily thermal. In contrast, mechanical traveling waves are attributed as possible excitation mechanisms in the far-field regime
Keywords :
finite element analysis; light interferometry; micro-optomechanical devices; micromechanical resonators; nanotechnology; optical modulation; amplified mechanical vibrations; finite element modeling; modulated optical fields; nanoelectromechanical oscillators; optical actuation; optical interferometry; silicon nitride; silicon thin film layers; Biomedical optical imaging; Nanobioscience; Nanoelectromechanical systems; Optical films; Optical interferometry; Optical modulation; Optical resonators; Optical sensors; Oscillators; Stimulated emission; $Q$ -factor; Finite element method (FEM); laser drive; microelectromechanical systems (MEMS); nanoelectromechanical systems (NEMS); nanomechanics; optical excitation; resonant sensors; thermomechanical actuations;
Journal_Title :
Selected Topics in Quantum Electronics, IEEE Journal of
DOI :
10.1109/JSTQE.2007.894190