Title :
InP/benzocyclobutene optical nanowires
Author :
Carette, M. ; Vilcot, J.P. ; Bernard, D. ; Decoster, D.
Author_Institution :
Inst. dElectronique, Univ. des Sci. et Technol. de Lille, Villeneuve d´´Ascq
Abstract :
A report is presented on the optical propagation loss of waveguides based on InP nanowires embedded in a benzocyclobutene matrix and fabricated through a wafer bonding process. Propagation loss was evaluated on waveguides of varying width; it can be as low as 0.8 dB/mm for a 300 x 300 nm InP.
Keywords :
III-V semiconductors; indium compounds; micro-optics; nanowires; optical fabrication; optical losses; optical materials; optical waveguides; organic compounds; wafer bonding; InP-benzocyclobutene matrix; optical nanowires; optical propagation loss; optical waveguide; size 300 nm; wafer bonding process;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20081169
