Title :
A Bio–Fluidic–Photonic Platform Based on Deep UV Modification of Polymers
Author :
Rabus, Dominik G. ; Bruendel, Mathias ; Ichihashi, Yasuhisa ; Welle, Alexander ; Seger, R. Adam ; Isaacson, Michael
Author_Institution :
California Univ., Santa Cruz, CA
Abstract :
We present a review of our work on deep UV (DUV) modification of methacrylate-based polymers. This technology serves as a platform for realizing planar and ridge waveguide-based devices, fluidic channels, and enables the patterning of living cells including neural cells in vitro. Details on the DUV chemistry and fabrication technologies including hot embossing of multimode interference couplers will be given
Keywords :
biological techniques; cellular biophysics; embossing; microfluidics; nanobiotechnology; optical couplers; optical fabrication; optical planar waveguides; optical polymers; photochemistry; ridge waveguides; biofluidic-photonic platform; deep ultraviolet chemistry; deep ultraviolet modification; fluidic channels; hot embossing; integrated microsystems; integrated nanosystems; living cell patterning; methacrylate-based polymers; multimode interference couplers; neural cells; planar waveguide; ridge waveguide; Biomedical optical imaging; Embossing; Integrated circuit technology; Optical device fabrication; Optical devices; Optical polymers; Optical refraction; Optical sensors; Optical variables control; Optical waveguides; Deep UV (DUV); photonic integrated circuits; polymer;
Journal_Title :
Selected Topics in Quantum Electronics, IEEE Journal of
DOI :
10.1109/JSTQE.2007.892073
