Title :
A Reliability Model for Low-Temperature Polycrystalline Silicon Thin-Film Transistors
Author :
Chen, Chih-Yang ; Lee, Jam-Wem ; Lee, Po-Hao ; Chen, Wei-Cheng ; Lin, Hsiao-Yi ; Yeh, Kuan-Lin ; Ma, Ming-Wen ; Wang, Shen-De ; Lei, Tan-Fu
Author_Institution :
Inst. of Electron., Nat. Chiao Tung Univ., Hsinchu
fDate :
5/1/2007 12:00:00 AM
Abstract :
We proposed here a reliability model that successfully introduces both the physical mechanisms of negative bias temperature instability (NBTI) and hot carrier stress (HCS) for p-channel low-temperature polycrystalline silicon thin-film transistors (LTPS TFTs). The proposed model is highly matched with the experimental results, in which the NBTI dominates the device reliability at small negative drain bias while the HCS dominates the degradation at large negative drain bias. In summary, the proposed model provides a comprehensive way to predict the lifetime of the p-channel LTPS TFTs, which is especially necessary for the system-on-panel circuitry design
Keywords :
semiconductor device reliability; silicon; thermal stability; thin film transistors; hot carrier stress; lifetime prediciton; low-temperature polycrystalline silicon thin-film transistors; negative bias temperature instability; p-channel; reliability model; Circuits; Degradation; Hot carriers; Negative bias temperature instability; Niobium compounds; Predictive models; Silicon; Stress; Thin film transistors; Titanium compounds; Hot carrier stress (HCS); low-temperature polycrystalline silicon thin-film transistors (LTPS TFTs); negative bias temperature instability (NBTI); reliability;
Journal_Title :
Electron Device Letters, IEEE
DOI :
10.1109/LED.2007.895454