Lumped Elastodynamic Model for MEMS: Formulation and Validation

Proposed in this paper is a symbolic linearly elastodynamic model for the analysis and synthesis of microelectromechanical system. In particular, the strain energy in the compliant links is computed from the results of a previous work, by representing beam deflections with small-displacement screws. This allows for a systematic coherent approach based on screw theory. Two case studies are proposed to illustrate the application of the model. In the first example, the elastodynamic model of a simple accelerometer is derived and compared to one available in the literature. In the second example, a complex accelerometer is modeled, fabricated, and tested. Comparison between the simulated results and data from the literature or obtained experimentally shows the accuracy of the proposed model.