2D silicon/ferroelectric liquid crystal spatial light modulators

Author

Drabik, Timothy J. ; Titus, Albert H. ; Handschy, Mark A. ; Banas, David ; Gaalema, Stephen D. ; Ward, David J.

Author_Institution

Georgia Inst. of Technol., Atlanta, GA, USA

Volume

15

Issue

4

fYear

1995

fDate

8/1/1995 12:00:00 AM

Firstpage

67

Lastpage

76

Abstract

We have developed a spatial light modulator technology based on foundry silicon fabrication processes. This technology employs a thin, ferroelectric liquid crystal light-modulating layer at the substrate´s surface, producing electrically addressed display devices with resolutions up to 256×256 and frame rates up to 10 kHz. We have also fabricated optically addressed smart-pixel arrays for low-level image processing. Performance has advanced rapidly due to design innovations and effective use of modern process features

Keywords

ferroelectric devices; liquid crystal devices; optical information processing; spatial light modulators; electrically addressed display devices; ferroelectric liquid crystal light-modulating layer; foundry silicon fabrication processes; liquid crystal spatial light modulators; low-level image processing; optically addressed smart-pixel arrays; substrate; Ferroelectric materials; Foundries; Liquid crystal devices; Liquid crystal displays; Liquid crystals; Optical arrays; Optical device fabrication; Optical modulation; Silicon; Spatial resolution;

fLanguage

English

Journal_Title

Micro, IEEE

Publisher

ieee

ISSN

0272-1732

Type

jour

DOI

10.1109/40.400643

Filename

400643