Two-Cathode Filtered Vacuum-Arc Plasma Source

Author

Aksenov, Ivan I. ; Aksyonov, Dmitriy S. ; Vasilyev, V.V. ; Luchaninov, A.A. ; Reshetnyak, E.N. ; Strel´nitskij, V.E.

Author_Institution

Nat. Sci. Center, Kharkov Inst. of Phys. & Technol., Kharkov, Ukraine

Volume

37

Issue

8

fYear

2009

Firstpage

1511

Lastpage

1516

Abstract

The design and operation principle of the new two-cathode filtered vacuum-arc plasma source are discussed. The results of probe measurements of ion components of the output plasma stream depending on magnetic field magnitude and geometry in plasma-guiding channels of the source are presented. The system effectiveness ratio of the device makes up to ~2.5%. The possibility of control of the ion current density distribution diagram is shown. The nonuniformity of component concentration distribution of the coating at the use of the cathodes from aluminum and titanium is about plusmn 6.5%.

Keywords

cathodes; coatings; current density; current distribution; filters; ion density; plasma density; plasma sources; vacuum arcs; coating; component concentration distribution; ion current density distribution diagram; plasma arc devices; plasma source; plasma stream; plasma-guiding channels; system effectiveness ratio; two-cathode filter; vacuum arc; Coatings; filters; ions; plasma arc devices;

fLanguage

English

Journal_Title

Plasma Science, IEEE Transactions on

Publisher

ieee

ISSN

0093-3813

Type

jour

DOI

10.1109/TPS.2009.2018820

Filename

4908964