DocumentCode
811763
Title
Dislocation scattering in n-type modulation doped Al0.3Ga0.7As/InxGa1-xAs/Al 0.3Ga0.7As quantum wells
Author
Zhao, Dianfen ; Kuhn, Kelin J.
Author_Institution
Dept. of Electr. Eng., Washington Univ., Seattle, WA, USA
Volume
38
Issue
12
fYear
1991
fDate
12/1/1991 12:00:00 AM
Firstpage
2582
Lastpage
2589
Abstract
The mobility due to misfit dislocation scattering in n-type modulation doped Al0.3Ga0.7As/InxGa1-xAs/Al 0.3Ga0.7As quantum wells is discussed. Initially, the dislocations are modeled as an array of orthogonal charged lines. The scattering potential is introduced, including both the coulombic and piezoelectric components. The expression for the mobility limited by dislocation scattering is established, and the anisotropic characteristics of mobility and its variation with various material and device parameters are presented and discussed
Keywords
III-V semiconductors; aluminium compounds; carrier mobility; dislocation scattering; gallium arsenide; indium compounds; semiconductor quantum wells; Al0.3Ga0.7As-InxGa1-x As -Al0.3Ga0.7As; anisotropic characteristics; coulombic component; misfit dislocation scattering; mobility; n-type modulation doped quantum wells; orthogonal charged lines; piezoelectric components; scattering potential; Anisotropic magnetoresistance; Artificial intelligence; Capacitive sensors; Electron mobility; Epitaxial layers; Impurities; Indium; Maxwell-Boltzmann distribution; Optical scattering; Particle scattering;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/16.158679
Filename
158679
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