High-Contrast Grating VCSELs

Author

Chang-Hasnain, Connie J. ; Zhou, Ye ; Huang, Michael C Y ; Chase, Christopher

Author_Institution

Dept. of Electr. Eng. & Comput. Sci., Univ. of California, Berkeley, CA

Volume

15

Issue

3

fYear

2009

Firstpage

869

Lastpage

878

Abstract

Recent advances in a single-layer 1-D high-index-contrast subwavelength grating structure are reviewed. Its incorporation into a vertical-cavity surface-emitting laser (VCSEL) structure enabled simple fabrication, lithographically defined polarization control and large aperture, single-transverse-mode control. Extraordinarily large fabrication tolerance is demonstrated with plusmn20% variation of the high-contrast grating (HCG) critical dimension. Emission wavelength of HCG-VCSEL varied 0.2% with a 40% change in lithography linewidth. Tunable VCSELs are fabricated using HCG, which led to a 8000 times reduction in the tunable mirror size and 160 times improved tuning speed of 63 ns. This configuration will open the door for a wide spectrum of optoelectronic devices in large wavelength regimes.

Keywords

diffraction gratings; laser beams; laser cavity resonators; laser mirrors; laser modes; laser tuning; lithography; optical control; optical fabrication; optoelectronic devices; spectral analysis; surface emitting lasers; HCG-VCSEL wavelength emission; high-contrast grating VCSELs; laser tuning; lithography; optical mirror; optoelectronic devices; polarization control; single-transverse-mode control; spectral analysis; time 63 ns; vertical-cavity surface-emitting laser fabrication; High-contrast subwavelength grating; optical MEMS; optical communication; vertical-cavity surface-emitting laser (VCSEL);

fLanguage

English

Journal_Title

Selected Topics in Quantum Electronics, IEEE Journal of

Publisher

ieee

ISSN

1077-260X

Type

jour

DOI

10.1109/JSTQE.2009.2015195

Filename

4909070