Author :
Ferrini, R. ; Lombardet, B. ; Wild, B. ; Houdré, R. ; Olivier, S. ; Benisty, H. ; Djoudi, A. ; Legouezigou, L. ; Hubert, S. ; Sainson, S. ; Chandouineau, J.-P. ; Fabre, S. ; Pommereau, E. ; Duan, G.H.
Abstract :
Two-dimensional photonic crystals (PCs) were fabricated in InP/GaInAsP waveguides by e-beam lithography and inductively coupled plasma etching. Transmission measurements through simple PC slabs, one-dimensional Fabry-Perot cavities and PC-based waveguides are reported showing clear improvements of the PC optical properties with respect to the results obtained by other etch methods
Keywords :
Fabry-Perot resonators; III-V semiconductors; cavity resonators; electron beam lithography; gallium arsenide; gallium compounds; indium compounds; optical fabrication; optical testing; optical waveguides; photonic band gap; semiconductor quantum wells; sputter etching; InP-GaInAsP; InP-based photonic crystals; InP/GaInAsP; electron-beam lithography; etch methods; inductively coupled plasma etching; one-dimensional Fabry-Perot cavities; optical characterisation; optical properties; photonic crystal slabs; photonic crystal-based waveguides; transmission measurements; two-dimensional photonic crystals;
