Title :
Submicronic thermal imaging by wavelength multiplexed photoreflectance technique
Author :
Holé, S. ; Tessier, G. ; Filloy, C. ; Fournier, D.
Author_Institution :
Lab. des Instruments et Syst. d´´ile de France, Univ. Pierre et Marie Curie, Paris, France
fDate :
8/15/2002 12:00:00 AM
Abstract :
High resolution temperature imaging techniques are necessary to optimise designs and detect failures of integrated circuits. An improved photoreflectance technique using simultaneous multiwavelength illumination is presented in order to probe optimally each material of integrated circuits and reduce drifts. It makes it possible to rapidly highlight hot-spots, a typical failure precursor
Keywords :
CCD image sensors; failure analysis; infrared imaging; inspection; integrated circuit testing; photoreflectance; CCD cameras; aliasing; camera image sampling; failure precursor; fast temperature modulation; high resolution imaging; hot-spots; integrated circuits; multiplexed multichannel system; simultaneous multiwavelength illumination; submicron thermal imaging; wavelength multiplexed photoreflectance;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20020685
