DocumentCode
813586
Title
Critical analysis of matching schemes in capacitively coupled discharges
Author
Demokan, O.
Author_Institution
Phys. Dept., Middle East Tech. Univ., Ankara, Turkey
Volume
31
Issue
5
fYear
2003
Firstpage
1100
Lastpage
1102
Abstract
It is shown that, in capacitively coupled radio frequency discharges, the amplitude of the discharge current may not have a unique value for a matching network designed to yield the maximum power transfer. The condition, which may lead to this uncertainty, is derived to avoid the possible, undesired mode of operation.
Keywords
high-frequency discharges; plasma sheaths; capacitive coupling; capacitively coupled discharges; capacitively coupled radio frequency discharges; critical analysis; discharge current; gas discharges; matching schemes; maximum power transfer; plasma impedance; power matching; radio frequency discharges; sheaths; Electrodes; Electromagnetic coupling; Electrons; Fault location; Plasma applications; Plasma devices; Plasma materials processing; Plasma sheaths; Radio frequency; Textile technology;
fLanguage
English
Journal_Title
Plasma Science, IEEE Transactions on
Publisher
ieee
ISSN
0093-3813
Type
jour
DOI
10.1109/TPS.2003.815480
Filename
1240064
Link To Document