Title :
Surface acoustic wave velocity in single-crystal AlN substrates
Author :
Bu, Guangquan ; Ciplys, D. ; Shur, M. ; Schowalter, L.J. ; Schujman, S. ; Gaska, R.
Author_Institution :
Dept. of Electr., Comput., & Syst. Eng., Rensselaer Polytech. Inst., Troy, NY, USA
Abstract :
The surface acoustic wave velocity has been measured on a-plane (c-propagation) and c-plane oriented bulk aluminum nitride (AlN) single crystals using the S/sub 11/-parameter method in the frequency range 160-360 MHz. The SAW velocity is 5760 m/s for both orientations. From comparison of this value with the simulations using various elastic constants of AlN available in literature, we estimated the elastic constant C/sub 44/ to be 122 /spl plusmn/ 1 GPa.
Keywords :
S-parameters; acoustic wave velocity; aluminium compounds; elastic constants; piezoelectric materials; surface acoustic waves; 160 to 360 MHz; 5760 m/s; AlN; S/sub 11/-parameter method; SAW velocity; c-propagation; elastic constants; single-crystal substrates; surface acoustic wave velocity; Acoustic measurements; Acoustic waves; Aluminum nitride; Crystalline materials; Crystals; Extraterrestrial measurements; Physics; Piezoelectric materials; Surface acoustic waves; Velocity measurement;
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
DOI :
10.1109/TUFFC.2006.1588412
