DocumentCode :
814266
Title :
Force-controllable, optically driven micromachines fabricated by single-step two-photon microstereolithography
Author :
Maruo, Shoji ; Ikuta, Koji ; Korogi, Hayato
Author_Institution :
Dept. of Micro Syst. Eng., Nagoya Univ., Japan
Volume :
12
Issue :
5
fYear :
2003
Firstpage :
533
Lastpage :
539
Abstract :
We have fabricated optically driven micromechanisms and demonstrated their motion under optical force. All of the movable microcomponents are directly fabricated through an assembly-free process using the high-speed scanning of a femtosecond laser focused inside a photocurable resin. Since these movable micromachines are made from photocurable resin transparent to visible and near-infrared light, they can be driven by the force of optical trapping. We demonstrate a simple, versatile method for driving movable micromachines. Part of the movable component is optically trapped by a single laser beam and manipulated according to the desired trajectory. Various types of motion, including rotation and swinging are demonstrated. In addition, the optically driven micromachines can be force-controlled to femtonewton order by adjusting the position trapped by the laser beam. We demonstrated the femtonewton order force-controllable swing motion of micromanipulators. A microturbine was rotated by circular scanning of a trapping laser beam in a liquid. Such force-controllable optically driven micromachines are promising manipulation tools for biomolecules such as DNA and protein.
Keywords :
micromechanical devices; photolithography; radiation pressure; two-photon processes; assembly-free fabrication process; biotechnology; high-speed laser beam scanning; micromanipulator; microturbine; optical force control; optical trapping; optically driven micromachine; photocurable resin; single-step two-photon stereolithography; Assembly; Biomedical optical imaging; Charge carrier processes; High speed optical techniques; Laser beams; Micromanipulators; Molecular biophysics; Optical devices; Resins; Ultrafast optics;
fLanguage :
English
Journal_Title :
Microelectromechanical Systems, Journal of
Publisher :
ieee
ISSN :
1057-7157
Type :
jour
DOI :
10.1109/JMEMS.2003.817894
Filename :
1240124
Link To Document :
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