DocumentCode
814281
Title
Surface Effects on P Type High Purity Germanium Detectors at 77°K
Author
Baertsch, R.D.
Author_Institution
General Electric Corporate Research and Development Schenectady, New York 12301
Volume
21
Issue
1
fYear
1974
Firstpage
347
Lastpage
359
Abstract
Ellipsometry has been used to measure the thickness of the residual film on the germanium surface after etching. Residual film thicknesses of 4 Ã
, 20 Ã
and 500 Ã
are obtained for the 10:1, 3:1 and 1:10 etches, respectively. A single detector was processed a total of 63 times using a variety of surface treatments. This study showed high breakdown voltage could be obtained with a variety of etches, but that the time the detector remains in the quenching solution should be minimized. The edge of the depletion region was scanned with a collimated 60 kV ¿ source after each surface treatment. The two scan results that could reprevroducibly be obtained were the type C, obtained with a 3:1 or 10:1 etch, a water quench, a brief evacuation and a rapid cool down, and the type B obtained using the same procedure with a 1:10 etch. The type C scan can be eliminated by heating in vacuum and restored by exposure to room air suggesting that it is caused by water vapor adsorbed on the surface. The type C scan is believed to result from hole trapping at the surface of the depletion region. An external electric field has been used to increase the breakdown voltage of the detector.
Keywords
Detectors; Ellipsometry; Etching; Fabrication; Germanium; Optical films; Optical polarization; Optical refraction; Surface treatment; Thickness measurement;
fLanguage
English
Journal_Title
Nuclear Science, IEEE Transactions on
Publisher
ieee
ISSN
0018-9499
Type
jour
DOI
10.1109/TNS.1974.4327482
Filename
4327482
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