DocumentCode :
814332
Title :
Pulsed Optical and Electron Beam Excitation of Silicon Position Sensitive Detectors
Author :
Berninger, W.H.
Author_Institution :
General Electric Research & Development Center Schenectady, N. Y. 12301
Volume :
21
Issue :
1
fYear :
1974
Firstpage :
386
Lastpage :
389
Abstract :
Silicon two dimensional position sensitive detectors were fabricated by ion implantation and their response to pulsed electron beam and optical excitation was determined. The results of measurements of rise time, position resolution, linearity and current gain as a function of electron accelerating voltage are presented. It is shown that the gain-voltage curves are consistent with a model incorporating a thin (¿0.5 ¿m) dead layer at the surface of the detector.
Keywords :
Current measurement; Electron beams; Electron optics; Ion implantation; Optical beams; Optical pulses; Optical sensors; Particle beam optics; Position sensitive particle detectors; Silicon;
fLanguage :
English
Journal_Title :
Nuclear Science, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9499
Type :
jour
DOI :
10.1109/TNS.1974.4327487
Filename :
4327487
Link To Document :
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