DocumentCode
814332
Title
Pulsed Optical and Electron Beam Excitation of Silicon Position Sensitive Detectors
Author
Berninger, W.H.
Author_Institution
General Electric Research & Development Center Schenectady, N. Y. 12301
Volume
21
Issue
1
fYear
1974
Firstpage
386
Lastpage
389
Abstract
Silicon two dimensional position sensitive detectors were fabricated by ion implantation and their response to pulsed electron beam and optical excitation was determined. The results of measurements of rise time, position resolution, linearity and current gain as a function of electron accelerating voltage are presented. It is shown that the gain-voltage curves are consistent with a model incorporating a thin (¿0.5 ¿m) dead layer at the surface of the detector.
Keywords
Current measurement; Electron beams; Electron optics; Ion implantation; Optical beams; Optical pulses; Optical sensors; Particle beam optics; Position sensitive particle detectors; Silicon;
fLanguage
English
Journal_Title
Nuclear Science, IEEE Transactions on
Publisher
ieee
ISSN
0018-9499
Type
jour
DOI
10.1109/TNS.1974.4327487
Filename
4327487
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