• DocumentCode
    814332
  • Title

    Pulsed Optical and Electron Beam Excitation of Silicon Position Sensitive Detectors

  • Author

    Berninger, W.H.

  • Author_Institution
    General Electric Research & Development Center Schenectady, N. Y. 12301
  • Volume
    21
  • Issue
    1
  • fYear
    1974
  • Firstpage
    386
  • Lastpage
    389
  • Abstract
    Silicon two dimensional position sensitive detectors were fabricated by ion implantation and their response to pulsed electron beam and optical excitation was determined. The results of measurements of rise time, position resolution, linearity and current gain as a function of electron accelerating voltage are presented. It is shown that the gain-voltage curves are consistent with a model incorporating a thin (¿0.5 ¿m) dead layer at the surface of the detector.
  • Keywords
    Current measurement; Electron beams; Electron optics; Ion implantation; Optical beams; Optical pulses; Optical sensors; Particle beam optics; Position sensitive particle detectors; Silicon;
  • fLanguage
    English
  • Journal_Title
    Nuclear Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9499
  • Type

    jour

  • DOI
    10.1109/TNS.1974.4327487
  • Filename
    4327487