Title :
Modified 1.3 μm buried ridge stripe laser for implanted-FET integration
Author :
Delorme, F. ; Kazmierski, C. ; Devoldere, P. ; Bouley, J.C.
Author_Institution :
CNET, Bagneux, France
fDate :
2/1/1990 12:00:00 AM
Abstract :
The buried-ridge stripe (BRS) laser has been modified for integration purposes. Adapting the laser to a quasi-planar configuration on the semi-insulating substrate, the authors report on an important improvement of the integrable BRS laser characteristics as compared with previously published ones. Also, the technology for this modified structure is shown to be compatible with the implanted transistor technology. No significant effect on the laser characteristics has been seen after Si implantation and subsequent heat treatment at 850°C for 10 s. A threshold current as low as 9.5 mA and an optical bandwidth of 6.1 GHz have been obtained in the case of Si implantation carried out after laser fabrication
Keywords :
III-V semiconductors; gallium arsenide; gallium compounds; indium compounds; integrated optoelectronics; ion implantation; semiconductor junction lasers; 1.3 micron; 6.1 GHz; 9.5 mA; InGaAsP-InP; InP:Si; buried ridge stripe laser; heat treatment; implanted-FET integration; ion implantation; optical bandwidth; quasi-planar configuration; semi-insulating substrate; semiconductor laser; threshold current;
Journal_Title :
Optoelectronics, IEE Proceedings J
