Title :
A metal-coated polymer micromirror for strain-driven high-speed multiaxis optical scanning
Author :
Tung, Yi-Chung ; Kurabayashi, Katsuo
Author_Institution :
Dept. of Mech. Eng., Univ. of Michigan, Ann Arbor, MI, USA
fDate :
6/1/2005 12:00:00 AM
Abstract :
We have developed a new polymer-based micromirror device capable of high-speed multiaxis out-of-plane scanning motion. The whole device structure integrates a metal-coated three-dimensional polydimethylsiloxane micromirror structure with an optically smooth surface and a single layer of silicon-on-insulator electrostatic comb-drive actuators. The high-strain mechanical elasticity of the polymer material allows for translating the in-plane comb-drive motions into three-degree-of-freedom scanning motion with a single actuator layer. The simple structure design and rapid response characteristics of the demonstrated device may lead to high-yield high-performance scanning micromirror technology.
Keywords :
elasticity; electrostatic actuators; integrated optics; micromirrors; optical films; optical polymers; optical scanners; silicon-on-insulator; electrostatic comb-drive actuators; high-speed scanning; high-strain elasticity; in-plane comb-drive motions; mechanical elasticity; metal-coated micromirror; multiaxis scanning; optical scanning; optically smooth surface; out-of-plane scanning motion; polydimethylsiloxane micromirror; polymer micromirror; scanning micromirror; silicon-on-insulator; strain-driven scanning; three-degree-of-freedom scanning motion; three-dimensional micromirror structure; Biomedical optical imaging; Capacitive sensors; High speed optical techniques; Micromechanical devices; Micromirrors; Microstructure; Mirrors; Optical devices; Optical polymers; Silicon; Electrostatic actuation; microelectromechanical devices; multiaxis optical scanning; polymer micromirror; three-dimensional (3-D) elastomer microstructures;
Journal_Title :
Photonics Technology Letters, IEEE
DOI :
10.1109/LPT.2005.846613
