Electronically controllable microvalves based on smart hydrogels: magnitudes and potential applications

Electronically controllable microvalves based on temperature sensitive hydrogels as actuators are described. A thermal-electronic interface was used for electronic control of the liquid flow. The hydrogel actuators were directly placed in a flow channel. They used the process medium as the swelling agent. Because of the direct placement into the channel the elastic properties of the hydrogel actuator were utilized to improve the pressure insensitivity, to achieve high particle tolerance and to avoid a leakage flow. The microvalves show an extremely simple structure. They can be fabricated using conventional micro technology within a few technical steps. The microvalves can also be miniaturized to a currently unrivalled extent of about 4 μm×4 μm×1μm. Valves for "laboratory on chip" applications can already be obtained. The switching times of the electronically controllable microvalves based on hydrogels are 0.3 s to 10 s.